3D LSI
Three-dimensional inspiron 1420 battery two-story low-cost LSI at the same time the crystallization method of silicon thin-film debut
Low cost three-dimensional LSI (TFT and photodiodes and other components, the vertical stack) method debut. Through the semiconductor laser so that sandwiching a layer of insulating film of the two-layer silicon film crystallization at the same time, this is Nara University Graduate School of Advanced Science and Technology, Industrial Technology Research Institute and ULVAC (ULVAC) Joint Working Group results.
The use of green laser inspiron 1501 battery
Development team in the glass substrate to form a two-layer silicon film, silicon sandwiching a silicon oxide film by exposure to the upper semiconductor laser, the upper and the lower the crystallization of silicon thin film simultaneously. The use of a longer-wavelength semiconductor green laser (wavelength 532nm), the upper silicon layer is not completely absorbed by the irradiation of the laser inspiron 1520 battery, through the absorption of the laser to the lower.
Crystalline silicon thin film for general use a shorter laser wavelength is about 300nm below the upper silicon film so absorbed most of the light. In this way, the use of excimer laser method will need to start from the lower to stack successive and crystallization, process costs are higher.
Film quality and a single crystal rather, try to use artificial retina LSI with inspiron 1521 battery
Using this method to complete the crystallization of silicon thin film, the upper can be formed around 1μm diameter multi-crystals, the lower size of several tens of nanometers can be formed micro-crystals. The upper carrier mobility of 550cm2 / (V-1s-1), with a single crystal rather, can be used to channel part of the TFT, etc.. For example, by membrane embedded in the upper silicon TFT, embedded in the membrane on the lower silicon photodiode, “to achieve artificial retina LSI” (Nara University, Graduate School of Advanced Science and Technology Associate Professor Uraoka line rule), the development team plans to promote the application of artificial retina apple A1189 development.
Achieved in the use of green laser crystallization of silicon thin-film field, had not achieved such a high carrier mobility precedent. Excimer laser with the use of gas compared with apple ibook g4 12 battery the use of similar green laser such as semiconductor laser has the advantages of lower maintenance costs.